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Probing electrical signals in silicon CMOS devices using electric field induced second harmonic generation
We report the use of electric-field-induced second-harmonic generation to investigate the electrical signal in CMOS chips with 2.3/spl mu/m femtosecond pulses. A linear relationship between the signal and applied voltage is found for voltages
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Main Authors: | , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | We report the use of electric-field-induced second-harmonic generation to investigate the electrical signal in CMOS chips with 2.3/spl mu/m femtosecond pulses. A linear relationship between the signal and applied voltage is found for voltages |
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DOI: | 10.1109/CLEOE.2005.1568025 |