Micromechanical resonators with integrated optical waveguides for sensing applications

Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8 kHz (Q=26.5) have been measured in air and mass detection of 510 fg/100 Hz is possible.

Saved in:
Bibliographic Details
Main Authors: Pruessner, M.W., Chuang, W.-H., Amarnath, K., Kanakaraju, S., Ghodssi, R.
Format: Conference Proceeding
Language:English
Subjects:
Biomedical optical imaging
Frequency measurement
Indium phosphide
Integrated optics
Microelectromechanical systems
Micromechanical devices
Optical resonators
Optical sensors
Optical waveguides
Resonant frequency
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Low-power indium phosphide microelectromechanical systems (MEMS) cantilever resonators with integrated optical waveguides for bio-chemical sensing are presented. Resonant frequencies up to 168.8 kHz (Q=26.5) have been measured in air and mass detection of 510 fg/100 Hz is possible.
DOI:10.1109/CLEO.2005.201914