MEMS switch for wireless communication circuits: fabrication process and simulation

This paper describes the process and methodology adopted for the design of a MEMS (micro electro mechanical system) switch in coplanar microstrip lines. The design proposed in this paper is the metallic bridge over a coplanar microstrip line suspended in both sides by two metallic posts. These MEMS...

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Bibliographic Details
Main Authors: Kretly, L.C., Tavora, A.A.S., Capovilla, C.E.
Format: Conference Proceeding
Language:English
Subjects:
Bridge circuits
Circuit simulation
Communication switching
Fabrication
Mechanical systems
Micromechanical devices
Microstrip
Microswitches
Switches
Wireless communication
Online Access:Request full text
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Summary:This paper describes the process and methodology adopted for the design of a MEMS (micro electro mechanical system) switch in coplanar microstrip lines. The design proposed in this paper is the metallic bridge over a coplanar microstrip line suspended in both sides by two metallic posts. These MEMS switches are designed for operation at S band satisfying the implementation requirements for Bluetooth and WLAN systems giving the possibility of operation in two protocols: IEEE 802.11b up to 11 Mb/s bit rate (commonly named Wi-Fi) and 802.11g up to 54 Mb/s, recently approved with significant rise in data rate when compared to the 802.11b. The S parameters and electromechanical displacement simulations are also presented.
DOI:10.1109/IMOC.2005.1580035