Comparison of Young's modulus dependency on beam accelerating voltage between EB- and FIB-CVD pillars

In this paper, we report our findings that Young's modulus of amorphous carbon nanopillars grown by FIB-CVD decreases with a decreasing ion-beam accelerating voltage, while that of those grown by EB-CVD increases.

Saved in:
Bibliographic Details
Main Authors: Okada, S., Mukawa, T., Kobayashi, R., Ishida, M., Ochiai, Y., Kaito, T., Matsui, S., Jun-ichi Fujita
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
Amorphous materials
Chemical technology
Electrons
Nanostructures
Particle beams
Physics
Structural beams
Vibration measurement
Voltage
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper, we report our findings that Young's modulus of amorphous carbon nanopillars grown by FIB-CVD decreases with a decreasing ion-beam accelerating voltage, while that of those grown by EB-CVD increases.
DOI:10.1109/IMNC.2005.203824