Atto-liter periodical cavities for optical molecular detection

A process technology for fabrication of high quality nano-hole arrays in thin gold layers on glass substrates, suitable for biomolecular applications is presented. Making use of a bi-layer resist system, electron-beam lithography and a lift-off technique, different arrays of square-shaped nano-holes...

Full description

Saved in:
Bibliographic Details
Main Authors: Piciu, O.M., Krogt, M.C., Sarro, P.M., Bossche, A., Docter, M.W.
Format: Conference Proceeding
Language:English
Subjects:
Biomedical optical imaging
Gold
High speed optical techniques
Nanoscale devices
Optical arrays
Optical detectors
Optical devices
Optical films
Optical surface waves
Substrates
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A process technology for fabrication of high quality nano-hole arrays in thin gold layers on glass substrates, suitable for biomolecular applications is presented. Making use of a bi-layer resist system, electron-beam lithography and a lift-off technique, different arrays of square-shaped nano-holes have been obtained. The holes dimensions are between 100nm and 200nm, with different lattice constants in each case. The arrays were furthermore optically characterized, showing uniformity and increased intensity of the out-coming light
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2005.1597733