Digital non-parametric characterization method for MEMS resonant sensor

This paper reports a new digital circuit architecture to identify the resonant frequencies of a micro-resonant sensor. A generic and configurable model of micro-resonant sensors has been used to evaluate the efficiency of combining a pseudorandom excitation with a non-parametric harmonic retrieval a...

Full description

Saved in:
Bibliographic Details
Main Authors: Ghassemi, F., Amendola, G., Blanchard, Y., Alquie, G., Sou, G.
Format: Conference Proceeding
Language:English
Subjects:
Circuit noise
Electromechanical sensors
Electronic circuits
Frequency estimation
Mechanical sensors
Micromechanical devices
Q factor
Resonance
Resonant frequency
Sensor phenomena and characterization
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This paper reports a new digital circuit architecture to identify the resonant frequencies of a micro-resonant sensor. A generic and configurable model of micro-resonant sensors has been used to evaluate the efficiency of combining a pseudorandom excitation with a non-parametric harmonic retrieval algorithm all within a digital characterization circuit. Estimation of the resonant frequencies is based on the eigenanalysis of the autocorrelation matrix of the sensor's output. An original discrimination scheme compensate for the over-estimation on the number of harmonics. Results indicate that this architecture can spectrally identify resonant sensors with up to 4 mechanical resonant modes with an accuracy of a 100ppm on the frequency estimation. Implementation of this characterization circuit would allow micro-resonant sensor identification, calibration and default compensation
ISSN:1930-0395
2168-9229
DOI:10.1109/ICSENS.2005.1597798