An ultrasonic MEMS particle separator with thick film piezoelectric actuation

Saved in:
Bibliographic Details
Main Authors: Hill, M., Townsend, R.J., Harris, N.R., White, N.M., Beeby, S.P., Jiexiong Ding
Format: Conference Proceeding
Language:English
Subjects:
Acoustic devices
Acoustic waves
Actuators
Fabrication
Microfluidics
Micromechanical devices
Particle separators
Piezoelectric materials
Silicon
Thick films
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:1051-0117
DOI:10.1109/ULTSYM.2005.1603056