Low noise silicon micromechanical bulk acoustic wave oscillator

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Bibliographic Details
Main Authors: Kaajakari, V., Rantakari, P., Koskinen, J.K., Mattila, T., Kiihamaki, J., Koskenvuori, M., Tittonen, I., Oja, A.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic noise
Acoustic waves
Circuit stability
Contact resistance
Electrodes
Microcavities
Micromechanical devices
Oscillators
Phase noise
Silicon
Online Access:Request full text
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ISSN:1051-0117
DOI:10.1109/ULTSYM.2005.1603091