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Silicon-based microwave coplanar waveguide BPF/BSF realization by open/short stubs

Microwave CPW bandpass/bandstop filters achieved by CPW open/short stubs have been presented. The filters are designed by a RF tool of HFSS and fabricated on a high resistivity (HR) (/spl rho/ /spl ges/ 1000/spl Omega//spl middot/cm) silicon substrate with 1-/spl mu/m SiO/sub 2/. The BPF accomplishe...

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Main Authors:	Shen Di, Shi Yanling, Xu Yu, Hu Hongmei, Xi Peisheng, Liu Yun, Jiang Ling
Format:	Conference Proceeding
Language:	English
Subjects:	Attenuation Band pass filters bandpass filter bandstop filter Conductivity Coplanar waveguide (CPW) Coplanar waveguides Couplings Insertion loss Microwave filters open/short stub Propagation losses Radio frequency Silicon
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creator	Shen Di Shi Yanling Xu Yu Hu Hongmei Xi Peisheng Liu Yun Jiang Ling
description	Microwave CPW bandpass/bandstop filters achieved by CPW open/short stubs have been presented. The filters are designed by a RF tool of HFSS and fabricated on a high resistivity (HR) (/spl rho/ /spl ges/ 1000/spl Omega//spl middot/cm) silicon substrate with 1-/spl mu/m SiO/sub 2/. The BPF accomplished by a dual-termination coupling open stub demonstrates low radiation with only -2.25dB insertion loss at peak transmission of 32 GHz on SiO/sub 2//Si substrate. The BSF realized by a multi-finger short stub on a SiO/sub 2//Si substrate has the attenuation of -17.5dB at the transmission frequency of 25 GHz. The filters have small size and good S-parameter characteristics, so they are attractive for monolithic microwave circuits (MMICs).
doi_str_mv	10.1109/APMC.2005.1606289
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fulltext	fulltext_linktorsrc
identifier	ISSN: 2165-4727
ispartof	2005 Asia-Pacific Microwave Conference Proceedings, 2005, Vol.1, p.4 pp.
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language	eng
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source	IEEE Xplore All Conference Series
subjects	Attenuation Band pass filters bandpass filter bandstop filter Conductivity Coplanar waveguide (CPW) Coplanar waveguides Couplings Insertion loss Microwave filters open/short stub Propagation losses Radio frequency Silicon
title	Silicon-based microwave coplanar waveguide BPF/BSF realization by open/short stubs
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