Computer as Powerful Tool in Reliability Testing of Thin Gate Dielectrics in MOS Devices

The paper describes an approach in the automation of reliability testing of thin gate dielectrics in MOS devices. It is based on using a computer for the full control of high-speed source/measurement equipment. The developed flexible software provides quick and accurate measurements, data acquisitio...

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Bibliographic Details
Main Authors: Vracar, L.M., Pesic, B.M., Stojadinovic, N.D.
Format: Conference Proceeding
Language:English
Subjects:
Application software
Automatic control
Automatic testing
Automation
Data acquisition
Data visualization
Dielectric devices
Dielectric measurements
MOS devices
reliability tests
software
Software measurement
Online Access:Request full text
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Summary:The paper describes an approach in the automation of reliability testing of thin gate dielectrics in MOS devices. It is based on using a computer for the full control of high-speed source/measurement equipment. The developed flexible software provides quick and accurate measurements, data acquisition and storage, and results visualization. Application examples concerning the reliability testing of thin Ta 2 O 5 gate dielectrics are presented and discussed
DOI:10.1109/EURCON.2005.1630159