FAROS - Fully Automated Robotic Sorter Cluster Use for Single Wafer Tracking in Semiconductor Manufacturing

In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a si...

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Bibliographic Details
Main Authors: Heinlein, F., Kuehn, A.
Format: Conference Proceeding
Language:English
Subjects:
Economic indicators
Environmental economics
Logistics
Manufacturing automation
Production equipment
Production facilities
Pulp manufacturing
Robotics and automation
Semiconductor device manufacture
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Summary:In this paper, we describe the beneficial combination of a fully automated robotic sorter approach called FAROS and the single wafer tracking concept for Infineon's mid nineties 8" wafer fab in Dresden, Germany. We describe the system itself, its implementation, and utilization within a single wafer tracking front end manufacturing environment including randomization. A discussion of typical performance indicators for semiconductor production equipment sheds light on the capability and economics of the FAROS system
ISSN:1078-8743
2376-6697
DOI:10.1109/ASMC.2006.1638742