Tuning of MEMS Gyroscope using Evolutionary Algorithm and " switched drive-angle †method

We propose a tuning method for micro-electro-mechanical systems (MEMS) gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased...

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Bibliographic Details
Main Authors: Keymeulen, D., Ferguson, M.I., Breuer, L., Peay, C., Oks, B., Yen-Cheng, Kim, D., MacDonald, E., Foor, D., Terrile, R., Yee, K.
Format: Conference Proceeding
Language:English
Subjects:
Control systems
Current measurement
Electrostatic measurements
Evolutionary computation
Frequency measurement
Gyroscopes
Microelectromechanical systems
Micromechanical devices
Resonant frequency
Tuning
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Summary:We propose a tuning method for micro-electro-mechanical systems (MEMS) gyroscopes based on evolutionary computation that has the capacity to efficiently increase the sensitivity of MEMS gyroscopes through tuning and, furthermore, to find the optimally tuned configuration for this state of increased sensitivity. We present the results of an experiment to determine the speed and efficiency of an evolutionary algorithm applied to electrostatic tuning of MEMS micro gyros. The MEMS gyro used in this experiment is a Pyrex post resonator gyro (PRG) in a closed-loop control system. A measure of the quality of tuning is given by the difference in resonant frequencies, or frequency split, for the two orthogonal rocking axes. The current implementation of the closed-loop platform is able to measure and attain a relative stability in the sub-millihertz range, leading to a reduction of the frequency split to less than 100 mHz
ISSN:1095-323X
2996-2358
DOI:10.1109/AERO.2006.1655973