A preliminary study of space charge distribution measurements at nanometer spatial resolution

The continuous reduction in size of devices, such as integrated circuits or micro-electro-mechanical systems (MEMS), results in the need to control with better and better resolution the materials involved, and in particular the electrical properties of the insulating and semiconducting parts. In thi...

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Bibliographic Details
Published in:IEEE transactions on dielectrics and electrical insulation 2006-10, Vol.13 (5), p.1036-1041
Main Authors: Dagher, G., Hole, S., Lewiner, J.
Format: Article
Language:English
Subjects:
Charge measurement
Current measurement
Electrical insulation
Electrical properties
Femtosecond
Integrated circuit measurements
Lasers
Measurement methods
Microelectromechanical systems
Micromechanical devices
Pressure waves
Pulse measurements
Pulsed electroacoustic methods
Size control
Space charge
Spatial resolution
Wave propagation
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Summary:The continuous reduction in size of devices, such as integrated circuits or micro-electro-mechanical systems (MEMS), results in the need to control with better and better resolution the materials involved, and in particular the electrical properties of the insulating and semiconducting parts. In this paper we propose an approach applicable to space charge measurement methods for improving the resolution to the nanometer range by using femtosecond laser pulses. It is shown that a resolution of about 60 nm in SiO 2 can be achieved with thermal and pressure wave propagation methods. Concerning the pulsed electro-acoustic method, the interfacial displacement as small as 100 fm can be measured at THz rate
ISSN:1070-9878
1558-4135
DOI:10.1109/TDEI.2006.247829