A square-diaphragm piezoresistive pressure sensor with a rectangular central boss for low-pressure ranges

Describes the theory and experimental data for a piezoresistive low-pressure sensor featuring a variety of advantages. The objective of this development was a sensor with high sensitivity, high overload range, and good linearity. In comparison to familiar sensor types, the sensor developed for the p...

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Bibliographic Details
Published in:IEEE transactions on electron devices 1993-10, Vol.40 (10), p.1754-1759
Main Authors: Sandmaier, H., Kuhl, K.
Format: Article
Language:English
Subjects:
Acoustic wave devices, piezoelectric and piezoresistive devices
Applied sciences
Bridge circuits
Electronics
Exact sciences and technology
Linearity
Mechanical sensors
Piezoresistance
Pressure measurement
Resistors
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensor phenomena and characterization
Silicon
Stress
Voltage
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Summary:Describes the theory and experimental data for a piezoresistive low-pressure sensor featuring a variety of advantages. The objective of this development was a sensor with high sensitivity, high overload range, and good linearity. In comparison to familiar sensor types, the sensor developed for the pressure range of 10 kPa exhibits an excellent sensitivity of 35 mV/V FSO (full scale output) and nonlinearity
ISSN:0018-9383
1557-9646
DOI:10.1109/16.277331