Plasma standard cell for laboratory demonstrations and experiments

The design, construction, and use of an apparatus for undergraduate laboratory experimentation and demonstration in the area of plasma technology and processes are described. Specific experiments being utilized are detailed. Plans for additional equipment features are discussed.< >

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Bibliographic Details
Main Authors: Lane, R.L., Grimsley, T.J.
Format: Conference Proceeding
Language:English
Subjects:
Educational institutions
Electrodes
Fabrication
Laboratories
Microelectronics
Plasma applications
Plasma materials processing
Sputter etching
Sputtering
Wet etching
Online Access:Request full text
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Description
Summary:The design, construction, and use of an apparatus for undergraduate laboratory experimentation and demonstration in the area of plasma technology and processes are described. Specific experiments being utilized are detailed. Plans for additional equipment features are discussed.< >
ISSN:0749-6877
2375-5350
DOI:10.1109/UGIM.1993.297055