Sol-gel lead zirconate-titanate thin films: effect of solution concentration

The microstructure development in lead zirconate titanate (PZT) compositions near the morphotropic phase boundary, PZT (50 PT/50 PZ) and PNZT (2 Nb/sub 2/O/sub 5//53 PT/45 PZ), has been investigated by scanning electron microscopy (SEM), optical microscopy, and X-ray diffraction analysis (XRD). The...

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Bibliographic Details
Main Authors: Livage, C., Safari, A., Klein, L.C.
Format: Conference Proceeding
Language:English
Subjects:
Electron optics
Microstructure
Niobium
Optical diffraction
Optical films
Optical microscopy
Scanning electron microscopy
Titanium compounds
Transistors
X-ray diffraction
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Summary:The microstructure development in lead zirconate titanate (PZT) compositions near the morphotropic phase boundary, PZT (50 PT/50 PZ) and PNZT (2 Nb/sub 2/O/sub 5//53 PT/45 PZ), has been investigated by scanning electron microscopy (SEM), optical microscopy, and X-ray diffraction analysis (XRD). The molar concentration of the precursor alkoxide solution has been increased to 0.75-M from the concentration of around 0.20M used in previous studies. Thin films have been fabricated by spin coating Pt/Ti/SiO/sub 2//Si substrates with the alkoxide solution. It is found that, in the solutions with high molar concentrations, the perovskite phase forms at lower temperatures than found previously in dilute solutions. In addition, the microstructure of the films is dense and uniform, showing none of the spherulites found previously.< >
DOI:10.1109/ISAF.1992.300596