New shunt wiring technologies for high performance HDTV CCD image sensors

New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low...

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Bibliographic Details
Main Authors: Orihara, Minami, Nakano, Hatano, Furumiya, Mutoh, Ohbo, Hokari
Format: Conference Proceeding
Language:English
Subjects:
Charge coupled image sensors
HDTV
Wiring
Online Access:Request full text
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Description
Summary:New shunt wiring technologies for HDTV FIT-CCD image sensors have been developed. They include tungsten direct shunt wiring structure. As well as a new layout for tungsten shunt lines and aluminum bus lines. A 1-inch format 2M pixel FIT-CCD image sensor was fabricated using these technologies. A low smear level, less than -110 dB, was achieved at 1 MHz frame shift frequency. Furthermore, a 1.2*10/sup 5/ electron charge handling capability was obtained up to 1.4 MHz frame shift frequency.< >
ISSN:0163-1918
2156-017X
DOI:10.1109/IEDM.1992.307319