High frequency measurement of dielectric thin films

A test vehicle was designed that enabled the measurement of the dielectric constant and loss tangent of thin dielectric films from 1 KHz to 40 GHz. The test vehicle consists of a metal-dielectric-metal parallel plate structure. The measurements were made with a LCR meter and a network analyzer.<...

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Bibliographic Details
Main Authors: Singh, P.K., Cochrane, R.S., Borrego, J.M., Rymaszewski, E.J., Lu, T.M., Chen, K.
Format: Conference Proceeding
Language:English
Subjects:
Dielectric constant
Dielectric films
Dielectric loss measurement
Dielectric measurements
Dielectric thin films
Frequency measurement
Loss measurement
Testing
Vehicles
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Description
Summary:A test vehicle was designed that enabled the measurement of the dielectric constant and loss tangent of thin dielectric films from 1 KHz to 40 GHz. The test vehicle consists of a metal-dielectric-metal parallel plate structure. The measurements were made with a LCR meter and a network analyzer.< >
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.1994.335137