The design and characterization of micromachined air-coupled capacitance transducers

Air-coupled capacitance transducers have been manufactured using anisotropically etched silicon backplates and commercially available dielectric films (Kapton and Mylar). The small backplate pits which result from etching, provide well ordered and highly uniform air layers between the backplate surf...

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Bibliographic Details
Published in:IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 1995-01, Vol.42 (1), p.42-50
Main Authors: Schindel, D.W., Hutchins, D.A., Lichun Zou, Sayer, M.
Format: Article
Language:English
Subjects:
Acoustics
Anisotropic magnetoresistance
Bandwidth
Capacitance
Damping
Design
Dielectric films
Etching
Exact sciences and technology
Fabrication
Fundamental areas of phenomenology (including applications)
Interferometers
Laser excitation
Manufacturing
Micromachining
Physics
Plate metal
Sensitivity analysis
Silicon
Transducers
Transduction
acoustical devices for the generation and reproduction of sound
Ultrasonic waves
Wideband
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Summary:Air-coupled capacitance transducers have been manufactured using anisotropically etched silicon backplates and commercially available dielectric films (Kapton and Mylar). The small backplate pits which result from etching, provide well ordered and highly uniform air layers between the backplate surface and thin dielectric film. Such uniformity allows the transducers to be manufactured with reproducible characteristics (a property difficult to achieve through conventional manufacturing). Impulse response studies in generation and detection, have indicated well-damped, wideband behavior, with bandwidths extending from
ISSN:0885-3010
1525-8955
DOI:10.1109/58.368314