A direct method for the extraction of diffusion length and surface recombination velocity from an EBIC line scan: planar junction configuration

A direct method of extracting bulk minority carrier diffusion length and surface recombination velocity from an EBIC line scan in the planar configuration is described. The accuracy of the method is verified by 3-D computer simulation and compared with existing methods. It mas found that this method...

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Bibliographic Details
Published in:IEEE transactions on electron devices 1995-05, Vol.42 (5), p.963-968
Main Authors: Chan, D.S.H., Ong, V.K.S., Phang, J.C.H.
Format: Article
Language:English
Subjects:
Applied sciences
Computer simulation
Diodes
Electronics
Exact sciences and technology
Failure analysis
Gaussian distribution
Integrated circuit reliability
Jacobian matrices
Linear regression
P-n junctions
Reliability engineering
Schottky diodes
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
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Summary:A direct method of extracting bulk minority carrier diffusion length and surface recombination velocity from an EBIC line scan in the planar configuration is described. The accuracy of the method is verified by 3-D computer simulation and compared with existing methods. It mas found that this method is much simpler to use and gives better accuracy than existing methods.< >
ISSN:0018-9383
1557-9646
DOI:10.1109/16.381995