Deep-submicron structures in YBCO: fabrication and measurements

We present a fabrication method that consistently produces superconducting structures with lateral dimensions down to 100 nm. The etching is done in a Distributed Electron Cyclotron (ECR-) etcher using a plasma of argon and oxygen. The sample is water cooled. Degradation of the etched structures is...

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Published in:IEEE transactions on applied superconductivity 1995-06, Vol.5 (2), p.1448-1451
Main Authors: van der Harg, A.J.M., van der Drift, E., Hadley, P.
Format: Article
Language:English
Subjects:
Argon
Cyclotrons
Degradation
Electric variables measurement
Electrons
Etching
Fabrication
Plasma applications
Plasma measurements
Yttrium barium copper oxide
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description We present a fabrication method that consistently produces superconducting structures with lateral dimensions down to 100 nm. The etching is done in a Distributed Electron Cyclotron (ECR-) etcher using a plasma of argon and oxygen. The sample is water cooled. Degradation of the etched structures is very limited. We discuss electrical measurements on long, narrow lines and constrictions.< >
doi_str_mv 10.1109/77.402838
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source IEEE Electronic Library (IEL) Journals
subjects Argon
Cyclotrons
Degradation
Electric variables measurement
Electrons
Etching
Fabrication
Plasma applications
Plasma measurements
Yttrium barium copper oxide
title Deep-submicron structures in YBCO: fabrication and measurements
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