Development of an Ultra-Small Angular Rate Sensor Element with a Laminated Quartz Tuning Fork

The authors have developed an ultra-small angular rate sensor element which was manufactured from a laminated quartz wafer. The quartz tuning fork sensor element (1.3 times 2.2 times 0.24 mm 3 ) is so small that it can be applied to the 2.5 times 3.2 times 1.3 mm 3 surface mount type angular rate se...

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Bibliographic Details
Main Authors: Ohtsuka, T., Inoue, T., Yoshimatsu, M., Matsudo, H., Okazaki, M.
Format: Conference Proceeding
Language:English
Subjects:
Arm
Circuits
Consumer products
Digital cameras
Lithography
Manufacturing
Mass production
Vibrations
Voltage
Weight control
Online Access:Request full text
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Summary:The authors have developed an ultra-small angular rate sensor element which was manufactured from a laminated quartz wafer. The quartz tuning fork sensor element (1.3 times 2.2 times 0.24 mm 3 ) is so small that it can be applied to the 2.5 times 3.2 times 1.3 mm 3 surface mount type angular rate sensor. This ultra-small angular rate sensor element consisted of weighted longer arms and a winged base part for damper. According to the experimental result, it was confirmed that the scale factor was 0.67 mV/(deg/s), zero point voltage was 1.349 V and the maximum angular rate was plusmn 210 deg/s
ISSN:2327-1914
DOI:10.1109/FREQ.2006.275364