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Fabrication of periodically poled domains transducers on LiNbO3

The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO 3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results a...

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Bibliographic Details
Main Authors: Courjon, E., Bodin, N., Lengaigne, G., Gauthier-Manuel, L., Daniau, W., Ballandras, S., Paruch, P., Triscone, J.M., Hauden, J.
Format: Conference Proceeding
Language:English
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Summary:The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO 3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes
ISSN:2327-1914
DOI:10.1109/FREQ.2006.275497