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Fabrication of periodically poled domains transducers on LiNbO3
The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO 3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results a...
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Main Authors: | , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | The development of piezoelectric transducers based on periodically poled ferroelectrics domains is investigated. Optical quality Z-cut LiNbO 3 wafers have been used for the fabrication of test devices operating in the range 7-70 MHz. The fabrication process is detailed and characterization results are reported. A very good agreement between theoretical predictions achieved by periodic finite element analysis and experiments is observed, allowing for a precise identification of the excited modes |
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ISSN: | 2327-1914 |
DOI: | 10.1109/FREQ.2006.275497 |