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Geometry Dependence of Leaky-Mode, Waveguide-Coupled, Polysilicon Photodetectors
Characterization of leaky-mode coupled polysilicon MSM photodetectors fabricated in 0.35 mum commercial CMOS with varying contact spacing and length reveals short and narrow devices have responsivity sufficient for optical interconnect applications
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| creator | Pownall, B. Yuan, G. Chen, T.W. Nikkel, P. Lear, K.L. |
| description | Characterization of leaky-mode coupled polysilicon MSM photodetectors fabricated in 0.35 mum commercial CMOS with varying contact spacing and length reveals short and narrow devices have responsivity sufficient for optical interconnect applications |
| doi_str_mv | 10.1109/LEOS.2006.279080 |
| format | conference_proceeding |
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| identifier | ISSN: 1092-8081 |
| ispartof | LEOS 2006 - 19th Annual Meeting of the IEEE Lasers and Electro-Optics Society, 2006, p.865-866 |
| issn | 1092-8081 2766-1733 |
| language | eng |
| recordid | cdi_ieee_primary_4054460 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | CMOS technology Detectors Geometry Optical attenuators Optical fiber testing Optical scattering Optical waveguides Photoconductivity Photodetectors Silicon |
| title | Geometry Dependence of Leaky-Mode, Waveguide-Coupled, Polysilicon Photodetectors |
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