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Design, Performance and Qualification of a Commercially Available MEMS Switch

An overview of the design and construction of the TT712 SPDT RF MEMS switch is presented, including a detailed discussion of the proprietary high force disk actuator, unique device on package construction, and in-line hermetic chip scale package. Typical switches have 100 million cycle lifetime, 70...

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Main Authors:	McKillop, J., Fowler, T., Goins, D., Nelson, R.
Format:	Conference Proceeding
Language:	English
Subjects:	Actuators Best practices Broadband Chip scale packaging Electronics industry Insertion loss MEMS Microswitches ohmic contacts Power semiconductor switches Qualifications Radio frequency Radiofrequency microelectromechanical systems reliability switches
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creator	McKillop, J. Fowler, T. Goins, D. Nelson, R.
description	An overview of the design and construction of the TT712 SPDT RF MEMS switch is presented, including a detailed discussion of the proprietary high force disk actuator, unique device on package construction, and in-line hermetic chip scale package. Typical switches have 100 million cycle lifetime, 70 musec switching speed, better than 10 mOmega trace resistance repeatability; 0.1 dB insertion loss, 35 dB return loss, and 30 dB isolation (all at 1 GHz) and can switch up to 30 W of RF power. A proprietary RF MEMS qualification methodology adapted from semiconductor industry best practices is also presented. Details of the qualification methodology and representative data are included, demonstrating the first successful commercial qualification of an RF MEMS switch
doi_str_mv	10.1109/EUMC.2006.281298
format	conference_proceeding
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source	IEEE Electronic Library (IEL) Conference Proceedings
subjects	Actuators Best practices Broadband Chip scale packaging Electronics industry Insertion loss MEMS Microswitches ohmic contacts Power semiconductor switches Qualifications Radio frequency Radiofrequency microelectromechanical systems reliability switches
title	Design, Performance and Qualification of a Commercially Available MEMS Switch
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