Comparison of Techniques for Microwave Characterization of BST Thin Films

Various techniques involving coplanar waveguide transmission lines, coplanar resonators, and interdigital capacitors, have been employed to characterize the dielectric properties of Ba 0.05 Sr 0.95 TiO 3 thin films at cryogenic conditions. The devices were patterned from a high-temperature supercond...

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Bibliographic Details
Published in:IEEE transactions on microwave theory and techniques 2007-02, Vol.55 (2), p.397-401
Main Authors: Suherman, P.M., Jackson, T.J., Lancaster, M.J.
Format: Article
Language:English
Subjects:
Barium strontium titanates
Barium-strontium-titanate (BST)
Binary search trees
Capacitors
coplanar resonator (CPR)
Coplanar transmission lines
coplanar waveguide (CPW)
Coplanar waveguides
Deposition
Dielectric thin films
High temperature superconductors
interdigital capacitor (IDC)
Microwave theory and techniques
Microwaves
Strontium
Superconducting thin films
Superconducting transmission lines
Thin films
Titanium dioxide
Transistors
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Summary:Various techniques involving coplanar waveguide transmission lines, coplanar resonators, and interdigital capacitors, have been employed to characterize the dielectric properties of Ba 0.05 Sr 0.95 TiO 3 thin films at cryogenic conditions. The devices were patterned from a high-temperature superconductor deposited on top of a single Ba 0.05 Sr 0.95 TiO 3 thin film. The measurements from these various techniques show a good agreement
ISSN:0018-9480
1557-9670
DOI:10.1109/TMTT.2006.889350