A miniaturized multiwire proportional chamber using CMOS wafer scale post-processing

This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and...

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Bibliographic Details
Main Authors: Blanco Carballo, V.M., Chefdeville, M., van der Graaf, H., Salm, C., Aarnink, A.A.I., Smits, S.M., Altpeter, D.M., Timmermans, J., Visschers, J.L., Schmitz, J.
Format: Conference Proceeding
Language:English
Subjects:
Anodes
Degradation
Electrodes
Electrons
Glass
Ionization
Radiation detectors
Voltage
Wires
X-ray detection
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Summary:This paper presents the technology of a new microsystem consisting of a CMOS chip with integrated high voltage electrodes, to be used as a detector for ionizing radiation. Its application ranges from particle detection in nuclear and high-energy physics to X-ray detection for materials research and medical purposes. In this paper, the process integration is detailed and system trade-off considerations are reported
ISSN:1930-8876
DOI:10.1109/ESSDER.2006.307655