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Above IC integrated SrTiO3 high K MIM capacitors
This paper describes realization and characterization of SrTiO 3 (STO) high k MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors
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Main Authors: | , , , , , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | This paper describes realization and characterization of SrTiO 3 (STO) high k MIM capacitors above BiCMOS integrated circuit (IC). These capacitances are connected to IC and are used as coupling capacitors |
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ISSN: | 1930-8876 |
DOI: | 10.1109/ESSDER.2006.307669 |