Low Temperature Growth of Carbon Nanotubes by Alcohol Catalytic CVD for Field Emitter Applications

The growth characteristics, such as temperature and pressure dependence, of carbon nanotubes (CNTs) by alcohol catalytic CVD (ACCVD) were studied. The thickness of the CNT layer is examined using scanning electron microscopy It was confirmed that the growth temperature could be lowered to as low as...

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Bibliographic Details
Main Authors: Sato, Hideki, Hata, Koichi, Hiasa, Ken, Saito, Yahachi
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Carbon nanotubes
Ethanol
Fabrication
Inductors
Scanning electron microscopy
Substrates
Temperature dependence
Temperature distribution
Transmission electron microscopy
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Summary:The growth characteristics, such as temperature and pressure dependence, of carbon nanotubes (CNTs) by alcohol catalytic CVD (ACCVD) were studied. The thickness of the CNT layer is examined using scanning electron microscopy It was confirmed that the growth temperature could be lowered to as low as 400degC. This result indicates that the ACCVD technique is suitable for the low temperature CNT-FEA fabrication
ISSN:2164-2370
DOI:10.1109/IVNC.2006.335495