Micro-EDM Milling of Micro Platinum Hemisphere

Micro-EDM milling has become one of the powerful means of 3D micromachining for MEMS. However, for micro- EDM milling, there isn't a general electrode wear compensation strategy matched to arbitrary materials of workpiece and electrode. In this paper, the machinability of platinum metal is eval...

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Bibliographic Details
Main Authors: Guanrong Hang, Guohui Cao, Zaicheng Wang, Jing Tang, Zhenlong Wang, Wansheng Zhao
Format: Conference Proceeding
Language:English
Subjects:
Chemical technology
Electrodes
general electrode wear compensation strategy
Machining
Manufacturing processes
Mechatronics
micro hemisphere
micro-EDM milling
Micromechanical devices
Microstructure
Milling
Platinum
Resistance heating
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Summary:Micro-EDM milling has become one of the powerful means of 3D micromachining for MEMS. However, for micro- EDM milling, there isn't a general electrode wear compensation strategy matched to arbitrary materials of workpiece and electrode. In this paper, the machinability of platinum metal is evaluated by taking latent heat of fusion and evaporation into account firstly. And then, a general electrode wear compensation strategy based on above-mentioned evaluation is proposed. The two characters of this strategy are employing an unequal thickness lamination for milling path and using a fixed flat surface as compensation reference. As a result, a 0100 mum micro platinum hemisphere is machined successfully. The surface quality of the platinum hemisphere is better than that of micro steel hemisphere. It is proved that platinum is feasible to be machined by micro-EDM.
DOI:10.1109/NEMS.2006.334849