P1L-3 Characteristics of LLSAW in Periodical Systems of Layered Electrodes

Resonant characteristics of longitudinal leaky surface acoustic waves (LLSAW) in infinite periodic interdigital transducers (IDT) with layered electrodes are calculated. An electrode is assumed to be consisted of two parts - under-layer of crystal material and top layer of aluminum. The simplest str...

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Bibliographic Details
Main Authors: Grigorievski, V.I., Gulyaev, Y.V., Plessky, Vp, Hong, S.S., Makkonen, T.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic transducers
Acoustic waves
Aluminum
Crystalline materials
Electrodes
Periodic structures
Q factor
Resonance
Shape
Surface acoustic waves
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Summary:Resonant characteristics of longitudinal leaky surface acoustic waves (LLSAW) in infinite periodic interdigital transducers (IDT) with layered electrodes are calculated. An electrode is assumed to be consisted of two parts - under-layer of crystal material and top layer of aluminum. The simplest structure is a periodic array of grooves of rectangular shape etched in the substrate with aluminum (AL) electrodes positioned on tops between adjacent grooves. Such a structure on YZ-cut of-lithium niobate (YZ-LN) shows calculated quality factors of two times larger as compared to AL electrodes on smooth surface with dissipation in electrodes taken into account. As an additional combination the under-layer of titanium-dioxide (TiO 2 )-AL is considered. This combination shows quality factors approximately three times larger than the structure with AL electrodes on smooth surface
ISSN:1051-0117
DOI:10.1109/ULTSYM.2006.384