Electrolysis-based Parylene Balloon Actuators for Movable Neural Probes

In order to track a specific neuron and keep good sampling neural signals during chronic implantation, the neural probes are highly desired to have moving capability. This paper presents a novel electrolysis-based parylene balloon actuator fabricated with MEMS technology. The actuator is integrated...

Full description

Saved in:
Bibliographic Details
Main Authors: Changlin Pang, Yu-Chong Tai, Burdick, J.W., Andersen, R.A.
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Electrochemical processes
Electrodes
Electrolysis actuators
Fabrication
Micromechanical devices
movable neural probes
Neurons
parylene balloon actuators
Probes
Sampling methods
Silicon
Springs
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In order to track a specific neuron and keep good sampling neural signals during chronic implantation, the neural probes are highly desired to have moving capability. This paper presents a novel electrolysis-based parylene balloon actuator fabricated with MEMS technology. The actuator is integrated with silicon probe to make it movable. A new fabrication technology has been developed to build a parylene balloon structure with silicon spring structure, electrolysis electrodes and electrolyte inside. By applying little current to electrolysis electrodes, high pressure is generated inside the parylene balloon by electrolysis. The spring structure is stretched with the parylene balloon expansion. Therefore the neural probe is moved by the actuation. The electrolysis actuator can generate large stain and pressure, requires modest electrical power and produces minimal heat. Due to the large volume expansion obtained via electrolysis, the small actuator can create a large force. The new electrolysis actuators for movable neural probes have been fabricated and validated.
DOI:10.1109/NEMS.2007.352166