NEMS Devices for Accelerometers Compatible with Thin SOI Technology

The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM character...

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Bibliographic Details
Main Authors: Oiller, E., Duraffourg, L., Delaye, M.T., Grange, H., Deneuville, S., Bernos, J., Dianoux, R., Marchi, F., Renaud, D., Baron, T., Andreucci, P., Robert, P.
Format: Conference Proceeding
Language:English
Subjects:
accelerometer
Accelerometers
CMOS technology
Costs
Delay
integration
Micromechanical devices
Nanoelectromechanical systems
Nanoscale devices
NEMS
Paper technology
Resonance
Silicon
SOI
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Summary:The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM characterizations have allowed to fabricate NEMS devices and to provide AFM characterizations.
DOI:10.1109/NEMS.2007.352257