NEMS Devices for Accelerometers Compatible with Thin SOI Technology

The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM character...

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Main Authors: Oiller, E., Duraffourg, L., Delaye, M.T., Grange, H., Deneuville, S., Bernos, J., Dianoux, R., Marchi, F., Renaud, D., Baron, T., Andreucci, P., Robert, P.
Format: Conference Proceeding
Language:English
Subjects:
accelerometer
Accelerometers
CMOS technology
Costs
Delay
integration
Micromechanical devices
Nanoelectromechanical systems
Nanoscale devices
NEMS
Paper technology
Resonance
Silicon
SOI
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creator Oiller, E.
Duraffourg, L.
Delaye, M.T.
Grange, H.
Deneuville, S.
Bernos, J.
Dianoux, R.
Marchi, F.
Renaud, D.
Baron, T.
Andreucci, P.
Robert, P.
description The paper presents thin SOI NEMS structures for accelerometers based on thin SOI technology and compatible with "in-IC" integration. Modeling of Casimir force, design of accelerometers, improvement of hybrid e-beam/DUV lithography and FH-vapor release, development of specific AFM characterizations have allowed to fabricate NEMS devices and to provide AFM characterizations.
doi_str_mv 10.1109/NEMS.2007.352257
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identifier ISBN: 9781424406104
ispartof 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 2007, p.180-185
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects accelerometer
Accelerometers
CMOS technology
Costs
Delay
integration
Micromechanical devices
Nanoelectromechanical systems
Nanoscale devices
NEMS
Paper technology
Resonance
Silicon
SOI
title NEMS Devices for Accelerometers Compatible with Thin SOI Technology
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