Integrated Gigant Magnetic Resistance based Angle Sensor

An integrated GMR (giant-magnetic-resistance) sensor is presented for 360deg angular measurements of rotating magnetic fields in automotive applications. The spin-valve GMR-layers are directly applied to a standard semiconductor 0.22 mum CMOS process by vertical integration of the sensor-bridges ato...

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Main Authors: Granig, W., Kolle, C., Hammerschmidt, D., Schaffer, B., Borgschulze, R., Reidl, C., Zimmer, J.I.
Format: Conference Proceeding
Language:English
Subjects:
Automotive applications
CMOS process
Electrical resistance measurement
Integrated circuit measurements
Magnetic circuits
Magnetic field measurement
Magnetic semiconductors
Magnetic sensors
Rotation measurement
Temperature sensors
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creator Granig, W.
Kolle, C.
Hammerschmidt, D.
Schaffer, B.
Borgschulze, R.
Reidl, C.
Zimmer, J.I.
description An integrated GMR (giant-magnetic-resistance) sensor is presented for 360deg angular measurements of rotating magnetic fields in automotive applications. The spin-valve GMR-layers are directly applied to a standard semiconductor 0.22 mum CMOS process by vertical integration of the sensor-bridges atop of active circuitry. The entire integrated angle-sensor comprises 2 orthogonal magnetized GMR-bridges for sine and cosine signal measurements, and the subsequent signal conditioning circuitry. The entire angular sensor is designed to work in harsh automotive environment in a temperature range of -40degC to 150degC. The strength for best precision covers a wide range from 20 to 50 mT. The resulting angular information itself can be obtained by SPI-readout and calculating the arc-trigonometric function of the bridge signals with a resolution of >13 bit in an auxiliary microcontroller. After individual calibration to compensate for production spread an accuracy of typical 0.5deg is achieved.
doi_str_mv 10.1109/ICSENS.2007.355525
format conference_proceeding
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source IEEE Xplore All Conference Series
subjects Automotive applications
CMOS process
Electrical resistance measurement
Integrated circuit measurements
Magnetic circuits
Magnetic field measurement
Magnetic semiconductors
Magnetic sensors
Rotation measurement
Temperature sensors
title Integrated Gigant Magnetic Resistance based Angle Sensor
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