Dielectric Charging of RF MEMS Capacitive Switches under Bipolar Control-Voltage Waveforms

Bipolar control-voltage waveforms have been proposed to mitigate dielectric charging in RF MEMS capacitive switches. In this work, for the first time, dielectric charging under bipolar waveforms is modeled and characterized quantitatively. In general, the experimental results agree with predictions...

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Bibliographic Details
Main Authors: Zhen Peng, Xiaobin Yuan, Hwang, J.C.M., Forehand, D.I., Goldsmith, C.L.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Charge injection
Dielectric constant
dielectric films
dielectric materials
Electrodes
Electrostatics
microelectromechanical devices
Predictive models
Radiofrequency microelectromechanical systems
Switches
Threshold voltage
Virtual manufacturing
Voltage control
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Description
Summary:Bipolar control-voltage waveforms have been proposed to mitigate dielectric charging in RF MEMS capacitive switches. In this work, for the first time, dielectric charging under bipolar waveforms is modeled and characterized quantitatively. In general, the experimental results agree with predictions based on the superposition of charging models that are extracted under either positive or negative voltage only. The present analysis indicates that, while bipolar waveforms can reduce charging, it is difficult to fine tune the waveforms to completely eliminate charging.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2007.380102