High-Q BAW Resonator on Pt/Ta2O5/SiO2-based Reflector Stack

This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta 2 O 5 /SiO 2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterizat...

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Bibliographic Details
Main Authors: Lobeek, J.-W., Strijbos, R., Jansman, A., Nancy Xin Li, Smolders, A.B., Pulsford, N.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic devices
Acoustic materials
Acoustic measurements
Acoustic waves
Biomembranes
Boundary conditions
Bulk-Acoustic-Wave (BAW) Devices
Dielectric materials
Front-End-Module
Impedance
Passive Integration
Q factor
SBAR
Substrates
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Description
Summary:This paper discusses the design and optimization of high-Q Bulk-Acoustic-Wave resonators using a Pt/Ta 2 O 5 /SiO 2 reflector stack. It can be shown that by properly designing the reflector stack and boundary conditions, large performance improvements can be realized. In this paper the characterization and design of the reflector stack is described and its results are presented.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2007.380253