Implantable Multichannel Silicon-based neural probe

A kind of silicon oxide based multi-channel neural probe array is reported. It has four shafts and twenty recording sites. Processes to fabricate the microelectrode and test results were described.

Saved in:
Bibliographic Details
Main Authors: Pei Weihua, Chen Hongda, Zhang Ruoxin, Sui Xiaohong, Zhu Lin, Lu Lin
Format: Conference Proceeding
Language:English
Subjects:
Bonding
Electrodes
Fabrication
Frequency
Gold
Impedance
Microelectrodes
Probes
Silicon
Testing
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:A kind of silicon oxide based multi-channel neural probe array is reported. It has four shafts and twenty recording sites. Processes to fabricate the microelectrode and test results were described.
ISSN:1099-4742
2376-8614
DOI:10.1109/LEOSST.2007.4288346