Progress in Large Integration Scale Circuits in SiON Technology

In this contribution the potentialities and the limitation of the silicon oxynitride (SiON) technology are reviewed and a number of integrated optical circuits and devices are presented. Mach-Zehnder, ring resonators, variable bandwidth filters, ring resonators based cross-bar matrices and a DQPSK r...

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Bibliographic Details
Main Authors: Melloni, A., Morichetti, F., Cusmai, G., Costa, R., Breda, A., Canavesi, C., Martinellit, M.
Format: Conference Proceeding
Language:English
Subjects:
Bandwidth
Delay lines
Integrated circuit technology
Integrated optics
Optical attenuators
Optical devices
Optical filters
Optical receivers
Optical ring resonators
Resonator filters
Silicon
Silicon Oxynitride
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Description
Summary:In this contribution the potentialities and the limitation of the silicon oxynitride (SiON) technology are reviewed and a number of integrated optical circuits and devices are presented. Mach-Zehnder, ring resonators, variable bandwidth filters, ring resonators based cross-bar matrices and a DQPSK receiver with interleaver and variable attenuators have been realized, characterized and tested in a 10 Gbit/s WDM system.
ISSN:2162-7339
DOI:10.1109/ICTON.2007.4296073