Micromachined Bulk Wave Acoustic Bandgap Devices

A MEMS bulk wave acoustic bandgap has been designed and experimentally verified. The acoustic bandgaps are realized by including tungsten (W) scatterers in a SiO 2 matrix. Wide frequency ranges where acoustic waves are forbidden to exist are formed due to the large density and acoustic impedance mis...

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Bibliographic Details
Main Authors: Olsson, R.H., Fleming, J.G., El-Kady, I.F., Tuck, M.R., McCormick, F.B.
Format: Conference Proceeding
Language:English
Subjects:
acoustic bandgap
acoustic crystal
Acoustic devices
Acoustic scattering
Acoustic waves
Aluminum nitride
Couplers
Frequency
Impedance
Micromechanical devices
phononic bandgap
phononic crystal
Photonic band gap
Tungsten
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Summary:A MEMS bulk wave acoustic bandgap has been designed and experimentally verified. The acoustic bandgaps are realized by including tungsten (W) scatterers in a SiO 2 matrix. Wide frequency ranges where acoustic waves are forbidden to exist are formed due to the large density and acoustic impedance mismatch between W and SiO 2 . The acoustic bandgap structures are fabricated in a 7-mask process that features integrated aluminum nitride piezoelectric couplers. Acoustic bandgaps in a square lattice have been measured at 33 and 67 MHz with up to 35 dB of acoustic rejection and bandwidths exceeding 35% of the midgap.
ISSN:2159-547X
DOI:10.1109/SENSOR.2007.4300132