Realization of Thin Film Specimens for Micro Tensile Tests

This paper is focused on specimen's design and fabrication for micro tensile tests. The experimental approach is based on a new micro tensile testing system and the development of silicon frames sustaining submicron thick self-standing films. The beam design has been optimized using Finite Elem...

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Bibliographic Details
Main Authors: Malhaire, C., Ignat, M., Dogheche, K., Brida, S., Josserond, C., Debove, L.
Format: Conference Proceeding
Language:English
Subjects:
Automatic testing
Design optimization
Etching
Fabrication
Finite element methods
Finite Element Modeling
MEMS
Micro tensile test
Semiconductor films
Silicon compounds
Substrates
System testing
Transistors
Young's modulus
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Summary:This paper is focused on specimen's design and fabrication for micro tensile tests. The experimental approach is based on a new micro tensile testing system and the development of silicon frames sustaining submicron thick self-standing films. The beam design has been optimized using Finite Element Simulations. SiN and Al beams with very large length on thickness ratio have been released from silicon substrate using standard etching process. The experimental force-displacement curve that has been obtained on a 3mm × 400 μm × 1 μm aluminum beam is shown and discussed.
ISSN:2159-547X
DOI:10.1109/SENSOR.2007.4300207