Differential Electrode Design for Electrostatic Actuator in Conducting Media

We present the design, modeling and experimental validation of a novel differential actuation scheme to enhance the performance of comb-drive electrostatic actuators in aqueous media. The new design mitigates the losses in parasitic impedance and extends the actuation of the devices into frequency r...

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Bibliographic Details
Main Authors: Mukundan, V., Pruitt, B.
Format: Conference Proceeding
Language:English
Subjects:
Biological system modeling
circuit model
Circuits
comb-drive electrostatic actuator
Displacement measurement
electric double layer
Electrodes
Electrostatic actuators
Etching
Frequency
ionic solutions
Parasitic capacitance
Silicon
Voltage
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Summary:We present the design, modeling and experimental validation of a novel differential actuation scheme to enhance the performance of comb-drive electrostatic actuators in aqueous media. The new design mitigates the losses in parasitic impedance and extends the actuation of the devices into frequency ranges suitable for biological samples, achieving a displacement of 3.5 μm in 100mM KCl. The frequency dependence of the electrostatic force has been tested by operating the devices in media of different ionic concentrations. Circuit models for the electric double layer phenomena are used to analyze the device behavior.
ISSN:2159-547X
DOI:10.1109/SENSOR.2007.4300337