Characterization and Performance Analysis of LPCVD Germanium-on-Silicon C-Band Photodiodes

Spatially-resolved photoresponse and bias-dependent modulation measurements of large area vertically-illuminated germanium photodiodes are presented. These measurements are compared with finite-element device simulations to theorize possible sources of performance limitations revealed by different m...

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Bibliographic Details
Main Authors: Orcutt, J.S., Olubuyide, O.O., DiLello, N., Hoyt, J.L., Ram, R.J.
Format: Conference Proceeding
Language:English
Subjects:
Buffer layers
Current measurement
Frequency response
Geometry
Germanium
germanium photodiodes
Passivation
Performance analysis
Performance evaluation
Photodetectors
photodiode characterization
Photodiodes
spatial characterization
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Description
Summary:Spatially-resolved photoresponse and bias-dependent modulation measurements of large area vertically-illuminated germanium photodiodes are presented. These measurements are compared with finite-element device simulations to theorize possible sources of performance limitations revealed by different measurement conditions.
DOI:10.1109/PS.2007.4300752