Evaluation of Scale Dependent of Fast Fracture Strength of Micro Component

In order to design the MEMS having good reliability, it is necessary to know the mechanical properties such as strength, fracture toughness and fatigue strength of micro components. In this paper, the fatigue testing machine was made. The examination of the fast fracture strength against the several...

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Bibliographic Details
Main Authors: Okazaki, T., Nakamura, S., Hirata, H., Mihara, Y., Yoshimura, H.
Format: Conference Proceeding
Language:English
Subjects:
Actuator Design
Actuators
Design engineering
Elements
Fatigue
Force control
Mechanical factors
Mechanical systems
Mechanisms
Micro and Nano Systems
Micromechanical devices
Modeling
Novel Actuator Systems
Reliability engineering
Silicon
Simulation Techniques and Methodologies
Structures
Testing
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Summary:In order to design the MEMS having good reliability, it is necessary to know the mechanical properties such as strength, fracture toughness and fatigue strength of micro components. In this paper, the fatigue testing machine was made. The examination of the fast fracture strength against the several kinds of specimens which dimensions were different each other was carried out. And volume dependency of the strength was discussed.
ISSN:2152-7431
2152-744X
DOI:10.1109/ICMA.2007.4303701