Low ß Ion Acceleration with the FOM Meqalac-System

The FOM MEQALAC (Multiple Electrostatic Quadrupole Array Linear ACcelerator) system in which four He+ ion beams of 2.2 mA are accelerated from 40 to 120 keV is discussed. The cavity has a modified Interdigital H structure (TE111). In between the 20 acceleration gaps electrostatic quadrupole lenses a...

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Bibliographic Details
Published in:IEEE transactions on nuclear science 1985-10, Vol.32 (5), p.3172-3174
Main Authors: Thomae, R. W., Siebenlist, F., van Amersfoort, P. W., Schonewille, F. G., Granneman, E. H. A., Klein, H., Schempp, A., Weis, T.
Format: Article
Language:English
Subjects:
Acceleration
Electrostatics
Ion accelerators
Ion beams
Ion implantation
Lenses
Linear accelerators
Particle beams
Plasma diagnostics
Stability
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Summary:The FOM MEQALAC (Multiple Electrostatic Quadrupole Array Linear ACcelerator) system in which four He+ ion beams of 2.2 mA are accelerated from 40 to 120 keV is discussed. The cavity has a modified Interdigital H structure (TE111). In between the 20 acceleration gaps electrostatic quadrupole lenses are placed to achieve radial stability of the beams. Some fundamental considerations concerning the design of MEQALAC systems are presented. Furthermore, parameters for plasma diagnostics and ion implantation accelerators are given.
ISSN:0018-9499
1558-1578
DOI:10.1109/TNS.1985.4334309