A high efficiency silicon nitride grating coupler

The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from λ = 1.25 to 1.45 μm for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.

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Bibliographic Details
Main Authors: Vivien, L., Maire, G., Sattler, G., Marris-Morini, D., Cassan, E., Laval, S., Kazmierczak, A., Giannone, D., Sanchez, B., Griol, A., Hill, D., Gylfason, K.B., Sohlstrom, H.
Format: Conference Proceeding
Language:English
Subjects:
Coatings
Electromagnetic waveguides
Etching
grating coupler
Gratings
microphotonics
Nanophotonics
Optical coupling
Photonics
Resonance
Silicon
silicon nitride
Tellurium
waveguide
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Description
Summary:The experimental demonstration of a high efficiency silicon nitride grating coupler is reported for wavelengths from λ = 1.25 to 1.45 μm for TE polarization. At the resonant angle, a coupling efficiency higher than 60% has been measured.
ISSN:1949-2081
1949-209X
DOI:10.1109/GROUP4.2007.4347702