SOI Devices and Ring Oscillators on Thin Dielectric Membranes For Pressure Sensing Applications

As first characterization results, static measurements showed variations between -2% and +6% of drain current of individual devices, VCOs revealed to be responsive to mechanical solicitation and, finally edgeless devices proved to be suitable for dynamic pressure sensing. Hence, the structure and th...

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Bibliographic Details
Main Authors: Olbrechts, B., Rue, B., Rinaldi, G., Stiharu, I., Flandre, D., Raskin, J.P.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Current measurement
Dielectric devices
Dielectric measurements
Mechanical variables measurement
Pressure measurement
Propellers
Ring oscillators
Shafts
Velocity measurement
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Summary:As first characterization results, static measurements showed variations between -2% and +6% of drain current of individual devices, VCOs revealed to be responsive to mechanical solicitation and, finally edgeless devices proved to be suitable for dynamic pressure sensing. Hence, the structure and the sensitivity of these systems allow us to figure out a wide range of possible applications, such as propeller shaft speed measurements.
ISSN:1078-621X
2577-2295
DOI:10.1109/SOI.2007.4357876