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An MILP Approach to Wafer Sampling and Selection

This paper introduces a novel algorithm for selecting the optimal wafers for measurement given a set of selection rules. The algorithm is based on assigning a penalty to each of the sampling rules and then using a mixed-integer linear program to pick the wafers which minimize the sum of the penaltie...

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Published in:	IEEE transactions on semiconductor manufacturing 2007-11, Vol.20 (4), p.400-407
Main Authors:	Good, R.P., Purdy, M.A.
Format:	Article
Language:	English
Subjects:	Adaptive sampling Algorithms Applied sciences Chambers Electronics Exact sciences and technology Frequency History Mathematical analysis Metrology Microelectronic fabrication (materials and surfaces technology) mixed-integer programming Monitoring Optimization Process control Production facilities Sampling Sampling methods Semiconductor device manufacture Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors wafer sampling wafer-level control Wafers
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cited_by	cdi_FETCH-LOGICAL-c328t-c3726cd11d82e2cfe21de6c7c731a4a8e418e1a566ff6eb8eb2c9a87a2fda9703
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container_end_page	407
container_issue	4
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container_title	IEEE transactions on semiconductor manufacturing
container_volume	20
creator	Good, R.P. Purdy, M.A.
description	This paper introduces a novel algorithm for selecting the optimal wafers for measurement given a set of selection rules. The algorithm is based on assigning a penalty to each of the sampling rules and then using a mixed-integer linear program to pick the wafers which minimize the sum of the penalties. By waiting until the metrology step to determine the best wafers to measure, a real-time decision can be made based on which wafers have previously been measured, the tools and chambers on which wafers were processed, and other user-specified selection criteria. The penalties can also be increased after a rule violation to ensure that each of the selection rules are satisfied at a finite frequency.
doi_str_mv	10.1109/TSM.2007.907616
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Solid state devices</topic><topic>Semiconductors</topic><topic>wafer sampling</topic><topic>wafer-level control</topic><topic>Wafers</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Good, R.P.</creatorcontrib><creatorcontrib>Purdy, M.A.</creatorcontrib><collection>IEEE All-Society Periodicals Package (ASPP) 2005-present</collection><collection>IEEE All-Society Periodicals Package (ASPP) 1998-Present</collection><collection>IEEE/IET Electronic Library (IEL)</collection><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Electronics & Communications Abstracts</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection><collection>ANTE: Abstracts in New Technology & Engineering</collection><collection>Engineering Research Database</collection><jtitle>IEEE transactions on semiconductor manufacturing</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Good, R.P.</au><au>Purdy, M.A.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>An MILP Approach to Wafer Sampling and Selection</atitle><jtitle>IEEE transactions on semiconductor manufacturing</jtitle><stitle>TSM</stitle><date>2007-11</date><risdate>2007</risdate><volume>20</volume><issue>4</issue><spage>400</spage><epage>407</epage><pages>400-407</pages><issn>0894-6507</issn><eissn>1558-2345</eissn><coden>ITSMED</coden><abstract>This paper introduces a novel algorithm for selecting the optimal wafers for measurement given a set of selection rules. 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language	eng
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source	IEEE Xplore (Online service)
subjects	Adaptive sampling Algorithms Applied sciences Chambers Electronics Exact sciences and technology Frequency History Mathematical analysis Metrology Microelectronic fabrication (materials and surfaces technology) mixed-integer programming Monitoring Optimization Process control Production facilities Sampling Sampling methods Semiconductor device manufacture Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors wafer sampling wafer-level control Wafers
title	An MILP Approach to Wafer Sampling and Selection
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