Two-Wavelength Grating Interferometry for MEMS Sensors

Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while i...

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Bibliographic Details
Published in:IEEE photonics technology letters 2007-12, Vol.19 (23), p.1895-1897
Main Authors: Ferhanoglu, O., Toy, M.F., Urey, H.
Format: Article
Language:English
Subjects:
Diffraction gratings
Displacement
Fingers
Grating interferometry
Gunshot detection systems
Illumination
Interferometry
Mechanical sensors
micro-electro- mechanical- systems (MEMS)
Micromechanical devices
Optical arrays
Optical interferometry
optical sensing
Optical sensors
Photonics
Sensor arrays
Sensors
Shot noise
Spectroscopy
Transducers
two-wavelength interferometry
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Description
Summary:Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7mum assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2007.908450