Nanoscale Resolution Microscopy and Ablation with Extreme Ultraviolet Lasers

We obtain a spatial resolution down to 38 nm with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.

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Bibliographic Details
Main Authors: Menoni, C.S., Brizuela, F., Brewer, C., Bravo, H., Langdon, B., Martz, D., Vaschenko, G., Luther, B., Marconi, M.C., Rocca, J.J., Chao, W., Anderson, E.H., Attwood, D.T., Vinogradov, A.V., Artioukov, I.A., Pershyn, Y.P., Kondratenko, V.V.
Format: Conference Proceeding
Language:English
Subjects:
Focusing
Laser ablation
Laser theory
Optical microscopy
Optical pumping
Optical sensors
Pump lasers
Spatial resolution
Surface emitting lasers
Ultraviolet sources
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Description
Summary:We obtain a spatial resolution down to 38 nm with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme ultraviolet lasers in combination with zone plate optics.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2007.4382492